Vacuum Chambers
Our precision-engineered vacuum chambers are designed for demanding applications in ultra-high vacuum (UHV), high-vacuum (HV), and cleanroom environments. Whether used in research, semiconductor processing, or custom vacuum systems, our chambers deliver exceptional performance, leak-tight integrity, and long-term reliability.
Construction & Design
- Material: 304 or 316L stainless steel for excellent corrosion resistance and vacuum compatibility.
- Fabrication: Fully welded construction using TIG welding for hermetic sealing and minimal outgassing.
- Surface Finish: Vacuum-grade internal surface treatment (electropolished or mechanically polished) to reduce virtual leaks and improve pump-down performance.
- Customization: Fully customizable ports (CF, KF, ISO), viewports, feedthroughs, internal brackets, and mounting flanges.
Specifications
- Chamber Shapes: Cubic, cylindrical, spherical, or custom geometries based on your application.
- Wall Thickness: Optimized for structural integrity under vacuum conditions, typically 3–12 mm depending on size and pressure.
- Leak Rate: Helium leak-tested to <1×10-9 mbar·L/s.
- Bakeout Temperature: Compatible with system bakeouts up to 200–250°C depending on material and configuration.
Applications
Used across a range of vacuum technologies including:
- Physical vapor deposition (PVD), sputtering, and thin-film coating systems
- Synchrotron beamlines and particle accelerators
- Space simulation chambers and cryogenic systems
- R&D test chambers in laboratories and universities
How to Order
Please provide the following parameters to receive a quotation:
- Chamber dimensions (length × width × height or diameter × length)
- Required flange types and port configurations (CF, KF, ISO sizes and positions)
- Surface treatment preferences (mechanical polish, electropolish, etc.)
- Operating vacuum level and temperature requirements
- Material selection (304, 316L, custom alloy if needed)
We will provide detailed drawings, pricing, and delivery timeline. All vacuum chambers are helium leak-tested, cleaned for vacuum service, and packaged for cleanroom compatibility.