Product Overview
The Small KF Flange Edge Welded Bellows is purpose-built for compact vacuum systems where space is at a premium but reliability cannot be compromised. Featuring standard KF (Klein Flange) quick-release connections, this bellows enables tool-free installation and removal — ideal for laboratories, semiconductor inspection stations, and any vacuum setup requiring frequent reconfiguration.
Despite its small footprint, this bellows benefits from the same micro-plasma edge welding process used across our entire product line. Each convolution is welded individually under controlled atmosphere, producing a hermetic seal that withstands millions of flex cycles without degradation. For dimensional details, check the KF-compatible entries in our AT-Series Catalog.
Key Benefits
- Compact, space-efficient design — minimal installed length for tight vacuum system layouts, without sacrificing stroke or cycle life
- Standard KF quick-release flanges (KF-16, KF-25, KF-40, KF-50) for fast, repeatable connections without tools — compatible with all major vacuum component brands
- Edge welded SS316L construction delivers 1 million+ cycle fatigue life and ultra-low outgassing for rapid pump-down to 10⁻⁸ mbar and below
- Excellent multi-axis compensation — absorbs axial, lateral, and angular misalignment simultaneously, protecting rigid piping from installation stress
- Proven in semiconductor cleanrooms — assembled in our Class 10,000 cleanroom facility, eliminating particulate contamination risk
Technical Specifications
- Flange Type: KF Quick-Release (KF-16 / KF-25 / KF-40 / KF-50)
- Material: SS316L Stainless Steel — see Material Selection Guide for alternatives
- Vacuum Level: 10⁻⁸ mbar (standard); UHV 10⁻¹⁰ mbar with copper gasket option
- Operating Temperature: -196°C to +450°C (bellows); O-ring limited to ~200°C for standard KF elastomer seals; metal-sealed KF available for higher temperatures
- Axial Stroke: ±3–5mm (model-dependent; custom stroke lengths available)
- Angular Deflection: ±5°
- Lateral Offset Capability: ±1–2mm
- Leak Rate: < 1×10⁻⁹ mbar·L/s (helium mass spectrometer verified)
Typical Applications
- Vacuum sensor and gauge connections — flexible mounting for Pirani, cold cathode, and capacitance manometer gauges
- Semiconductor inspection and metrology equipment — wafer inspection stations, thin-film measurement tools
- Laboratory analytical instruments — mass spectrometers, gas chromatographs, surface analysis chambers
- Optical coating vacuum chambers — flexible feedthrough protection for lens coating systems
- Small vacuum pump isolation — turbomolecular and scroll pump connections that require vibration decoupling
