Product Overview
The Copper Gasket Sealed Edge Welded Bellows Assembly is our flagship UHV-grade product — purpose-built for applications where 10⁻¹⁰ Torr vacuum integrity is non-negotiable. By combining precision edge welded SS316L bellows with copper gasket (ConFlat-style) metal seals on all flange interfaces, this assembly eliminates every potential leak path. There are no elastomers, no organic materials — only all-metal, fully bakeable construction that withstands repeated 450°C bakeout cycles without degradation.
This is the bellows assembly specified by synchrotron light sources, particle accelerator facilities, and national laboratories worldwide. Every unit is individually helium mass spectrometer leak tested to verify leak rates below 1×10⁻¹⁰ mbar·L/s — the practical detection limit of commercial helium leak detectors. For an in-depth comparison of UHV sealing technologies, see our Edge Welded Bellows Technical Guide.
Key Features
- Copper gasket all-metal sealing on all flange faces — zero permeation, zero outgassing, and unlimited shelf life compared to elastomer O-rings that age and leak
- Verified UHV performance to 10⁻¹⁰ Torr with individual helium leak test certification provided for every assembly shipped
- Fully bakeable to 450°C — compatible with aggressive UHV bakeout protocols; copper gaskets maintain seal integrity through repeated thermal cycling
- Precision edge welded diaphragm stack delivers axial motion compensation with spring rate precision of ±5% — critical for beamline optical alignment stability
- Class 10,000 cleanroom assembly and vacuum packaging — arrives ready for installation with minimal pump-down time
- Full material traceability with EN 10204 3.1 certification available — supporting your quality system documentation requirements
Technical Specifications
- Type: Edge Welded Bellows Assembly with Copper Gasket Sealing
- Sealing Method: Copper Gasket Metal Seal (ConFlat / CF type)
- Material: SS316L Stainless Steel — Inconel 718 available for non-magnetic or extreme temperature applications (see Material Selection Guide)
- Vacuum Level: UHV — 10⁻¹⁰ mbar (Torr) achieved and verified
- Leak Rate: < 1×10⁻¹⁰ mbar·L/s (helium MST verified per unit)
- Bake-out Temperature: Up to 450°C (SS316L); up to 700°C with Inconel 718
- Flange Type: UHV Standard Flange — CF-16, CF-35, CF-63, CF-100, CF-150, and custom sizes
- Cycle Life: 1,000,000+ cycles at rated stroke
- Surface Finish: Electropolished (Ra ≤ 0.4μm) standard for UHV applications
Typical Applications
- Semiconductor manufacturing systems — UHV wafer transfer modules, ALD/ALE chamber exhaust bellows requiring bakeout compatibility
- Particle accelerator beamlines — synchrotron radiation front-ends, insertion device vacuum chambers, RF cavity bellows
- Synchrotron radiation facilities — photon beam transport lines, monochromator vacuum vessels, experimental end-station connections
- Surface science instruments — XPS, AES, LEED, and STM systems demanding the lowest achievable base pressures
- Nuclear and fusion research — tritium-handling vacuum systems, neutral beam injector bellows, plasma diagnostic feedthroughs
