Precision Thin-Diaphragm Edge Welded Bellows

Product Overview

The Precision Thin-Diaphragm Edge Welded Bellows is the core flexible element supplied without flanges — purpose-built for OEMs, system integrators, and research laboratories that have in-house flange welding capability and prefer to integrate the bellows directly into their own assemblies. By supplying the bellows element alone, we give you maximum design freedom to weld on your own flange geometry, end fittings, or vacuum chamber interfaces.

Manufactured through micro-plasma edge welding of ultra-thin diaphragms (wall thickness as low as 0.05mm), this bellows achieves the lowest spring rates and highest stroke-to-length ratios in our product line. It is the same core technology used in our own UHV-grade assemblies, now available as a standalone component. We offer one of the most comprehensive size ranges in the industry — from 10mm to 1,200mm+ OD — with particular strength in extra-large diameters and custom dimensions. Browse the full range in our AT-Series Catalog.

Key Features

• Core edge welded diaphragm stack — supplied without flanges for maximum customer integration flexibility; weld on your own CF, KF, ISO, or custom flanges
• Ultra-High Vacuum (UHV) compatible — all-metal, elastomer-free construction with verified leak rates below 1×10⁻¹⁰ mbar·L/s, suitable for 10⁻¹⁰ Torr applications
• Ultra-low outgassing — electropolished surface finish (Ra ≤ 0.4μm) minimizes water vapor adsorption and accelerates pump-down to UHV base pressure
• Fully bakeable to 450°C — withstands aggressive UHV conditioning protocols without seal degradation
• Wall thickness from 0.05mm — ultra-thin diaphragms enable the lowest spring rates and highest flexibility for sensitive instruments and precision motion systems
• Industry-leading size range — standard from 10mm to 1,200mm+ OD; custom diameters and non-standard aspect ratios on request
• Cleanroom assembled and vacuum packaged — arrives contamination-free and ready for your welding process

Technical Specifications

• Type: Edge Welded Bellows Element (without flanges — open tube ends for customer welding)
• Material: SS316L Stainless Steel (AM350, Inconel 718, Hastelloy C-22 available — see Material Selection Guide)
• Vacuum Level: Ultra-High Vacuum — 10⁻¹⁰ mbar (Torr)
• Leak Rate: < 1×10⁻¹⁰ mbar·L/s (helium MST verified per unit; test certificate provided)
• Bake-out Temperature: Up to 450°C (SS316L); up to 700°C (Inconel 718)
• Wall Thickness: 0.05mm – 0.5mm (application-dependent)
• Surface Finish: Electropolished (Ra ≤ 0.4μm) / Passivated
• Size Range: 10mm – 1,200mm+ OD (standard); custom diameters available
• Cycle Life: 1,000,000+ cycles at rated stroke (dependent on wall thickness and stroke specification)

Typical Applications

• Semiconductor manufacturing equipment — OEM integration into wafer transfer modules, gate valves, and process chamber sub-assemblies
• Particle accelerator systems — beam position monitor bellows, RF cavity flexible interconnects, insertion device vacuum chambers
• Synchrotron radiation facilities — photon beamline bellows integrated into custom vacuum vessels by facility engineering teams
• Surface science instruments — custom UHV analysis chamber bellows integrated by instrument manufacturers
• Thin film deposition systems — OEM integration into sputtering, evaporation, and ALD tool vacuum subsystems

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