Alpha Technology supplies high-performance ceramic-to-metal electrical feedthroughs designed for ultra-high vacuum (UHV) environments. Whether you need to bring kilovolt power, RF signals, thermocouple readings, or multi-pin instrumentation into your vacuum chamber, our feedthroughs ensure reliable electrical transmission while maintaining vacuum integrity to 10⁻¹⁰ mbar·L/s.
All feedthroughs are manufactured with high-purity alumina ceramic insulation brazed to stainless steel bodies, creating a true hermetic seal with no organic potting compounds that would outgas or degrade under bakeout. This makes them fully compatible with UHV conditioning protocols up to 450°C. For integration with our bellows products, see our Edge Welded Bellows Technical Guide for motion feedthrough applications.
Technical Specifications
| Feature | Specification |
|---|---|
| Vacuum Leak Rate | < 1×10⁻¹⁰ mbar·L/s (helium MST verified per unit) |
| Temperature Range | -150°C to 450°C (bakeable) |
| Insulation Material | High-purity Alumina Ceramic (Al₂O₃ ≥ 99.7%) |
| Body Material | Stainless Steel (SS304 / SS316L) |
| Conductor Options | Oxygen-free Copper (OFHC), Nickel, Molybdenum |
| Mounting Types | CF Flange, KF Flange, Weldable stubs |
Product Series
- Power Feedthroughs: Voltage ratings from 1kV to 30kV; current capacities up to 800 Amps. Ideal for semiconductor process equipment — sputtering cathodes, ion source power, substrate bias — and nuclear instrumentation.
- Multipin Feedthroughs: Configurations for MS5015, MS26482, Sub-C, and USB 2.0. Perfect for research instrumentation — in-vacuum sensor arrays, motion controller signals, and data acquisition.
- Coaxial Feedthroughs: BNC, MHV, SHV (5kV-20kV), SMA, and N-type interfaces for RF and high-frequency signal transmission in aerospace test systems and particle accelerator diagnostics.
- Thermocouple Feedthroughs: Compatible with Type K, Type C, and other thermocouple pairs for precise in-vacuum temperature monitoring during industrial vacuum processing.
- Ceramic Breaks: Electrical isolation for 10kV, 30kV, and 50kV systems — essential for floating substrate holders and electro-static chuck power delivery.
Key Performance Data (Power Series)
| Voltage Rating | Current Range | Pins |
|---|---|---|
| 1kV | 7 – 22 A | 1, 2, 4, 8 |
| 5kV | 7 – 90 A | 1, 2, 4, 8 |
| 8kV | 95 – 800 A | 1, 2 |
| 12kV | 50 – 145 A | 1, 2, 3, 4 |
